Laser sensorIt is a new technology developed in the 1960s that has been widely applied in high-precision, non-contact, automated, and high-efficiency measurement techniques. For example, laser interference length measurement technology has been widely used in precision length measurement such as magnetic rulers, induction synchronizers, and grating calibration; Precision machine tool control, calibration, and precise positioning in integrated circuit manufacturing. Laser has the characteristics of energy concentration, good directionality, good monochromaticity, and strong interference ability. Laser sensors can be divided into three categories based on their working principles: laser interference sensors, laser diffraction sensors, andLaser scanning sensorAmong them, the application of laser interferometric sensors is predominant.

suchsensorIt is based on the interference phenomenon of light. According to physics, two beams of light with the same wavelength (frequency) and phase correlation have coherence. That is to say, when they overlap with each other, there will be an increase or decrease in light intensity, resulting in interference fringes. The principle that interference fringes change with the measured length can be used to achieve length measurement.